Ontology highlight
ABSTRACT:
SUBMITTER: Liapis AC
PROVIDER: S-EPMC7942784 | biostudies-literature | 2020 Dec
REPOSITORIES: biostudies-literature
Liapis Andreas C AC Subramanian Ashwanth A Cho Sangyeon S Kisslinger Kim K Nam Chang-Yong CY Yun Seok-Hyun SH
Advanced materials interfaces 20201109 24
A novel atomic layer method for encapsulating individual micro- and nano-particles with thin (sub-10-nm) dielectric films is presented. This method leverages the diffusion of vapor-phase precursors through an underlying inert polymer film to achieve growth of a metal oxide film on all sides of the particle simultaneously; even on the side that is in contact with the substrate. Crucially, the deposition is performed on stationary particles and does not require an agitation mechanism or a special ...[more]