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Conformal Coating of Freestanding Particles by Vapor-Phase Infiltration.


ABSTRACT: A novel atomic layer method for encapsulating individual micro- and nano-particles with thin (sub-10-nm) dielectric films is presented. This method leverages the diffusion of vapor-phase precursors through an underlying inert polymer film to achieve growth of a metal oxide film on all sides of the particle simultaneously; even on the side that is in contact with the substrate. Crucially, the deposition is performed on stationary particles and does not require an agitation mechanism or a special reaction chamber. Here, conformal coatings of alumina are shown to improve stability in aqueous environments for two optically-relevant particles: compound semiconductor laser microparticles and lead halide perovskite nanocrystals.

SUBMITTER: Liapis AC 

PROVIDER: S-EPMC7942784 | biostudies-literature |

REPOSITORIES: biostudies-literature

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