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High Yield Transfer of Clean Large-Area Epitaxial Oxide Thin Films.

ABSTRACT: In this work, we have developed a new method for manipulating and transferring up to 5 mm × 10 mm epitaxial oxide thin films. The method involves fixing a PET frame onto a PMMA attachment film, enabling transfer of epitaxial films lifted-off by wet chemical etching of a Sr₃Al₂O₆ sacrificial layer. The crystallinity, surface morphology, continuity, and purity of the films are all preserved in the transfer process. We demonstrate the applicability of our method for three different film compositions and structures of thickness ~ 100 nm. Furthermore, we show that by using epitaxial nanocomposite films, lift-off yield is improved by ~ 50% compared to plain epitaxial films and we ascribe this effect to the higher fracture toughness of the composites. This work shows important steps towards large-scale perovskite thin-film-based electronic device applications.

SUBMITTER: Zhang B

PROVIDER: S-EPMC8187697 | biostudies-literature | 2021 Jan

REPOSITORIES: biostudies-literature

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High Yield Transfer of Clean Large-Area Epitaxial Oxide Thin Films.

Zhang Bowen B Yun Chao C MacManus-Driscoll Judith L JL

Nano-micro letters 20210104 1

In this work, we have developed a new method for manipulating and transferring up to 5 mm × 10 mm epitaxial oxide thin films. The method involves fixing a PET frame onto a PMMA attachment film, enabling transfer of epitaxial films lifted-off by wet chemical etching of a Sr3Al2O6 sacrificial layer. The crystallinity, surface morphology, continuity, and purity of the films are all preserved in the transfer process. We demonstrate the applicability of our method for ...[more]

PMID: 34138235

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