Ontology highlight
ABSTRACT:
SUBMITTER: Kamiya K
PROVIDER: S-EPMC8241875 | biostudies-literature | 2021 Jun
REPOSITORIES: biostudies-literature
Kamiya Koshi K Kayama Kazuto K Nobuoka Masaki M Sakaguchi Shugo S Sakurai Tsuneaki T Kawata Minori M Tsutsui Yusuke Y Suda Masayuki M Idesaki Akira A Koshikawa Hiroshi H Sugimoto Masaki M Lakshmi G B V S GBVS Avasthi D K DK Seki Shu S
Nature communications 20210629 1
The critical dimension of semiconductor devices is approaching the single-nm regime, and a variety of practical devices of this scale are targeted for production. Planar structures of nano-devices are still the center of fabrication techniques, which limit further integration of devices into a chip. Extension into 3D space is a promising strategy for future; however, the surface interaction in 3D nanospace make it hard to integrate nanostructures with ultrahigh aspect ratios. Here we report a un ...[more]