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Toward Enhanced Humidity Stability of Triboelectric Mechanical Sensors via Atomic Layer Deposition.

ABSTRACT: Humid conditions can disrupt the triboelectric signal generation and reduce the accuracy of triboelectric mechanical sensors. This study demonstrates a novel design approach using atomic layer deposition (ALD) to enhance the humidity resistance of triboelectric mechanical sensors. Titanium oxide (TiO_x) was deposited on polytetrafluoroethylene (PTFE) film as a moisture passivation layer. To determine the effective ALD process cycle, the TiO_x layer was deposited with 100 to 2000 process cycles. The triboelectric behavior and surface chemical bonding states were analyzed before and after moisture exposure. The ALD-TiO_x-deposited PTFE showed three times greater humidity stability than pristine PTFE film. Based on the characterization of TiO_x on PTFE film, the passivation mechanism was proposed, and it was related to the role of the oxygen-deficient sites in the TiO_x layer. This study could provide a novel way to design stable triboelectric mechanical sensors in highly humid environments.

SUBMITTER: Kim W

PROVIDER: S-EPMC8308376 | biostudies-literature |

REPOSITORIES: biostudies-literature

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