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Large-scale synthesis of uniform hexagonal boron nitride films by plasma-enhanced atomic layer deposition.


ABSTRACT: Hexagonal boron nitride (h-BN) has been previously manufactured using mechanical exfoliation and chemical vapor deposition methods, which make the large-scale synthesis of uniform h-BN very challenging. In this study, we produced highly uniform and scalable h-BN films by plasma-enhanced atomic layer deposition, which were characterized by various techniques including atomic force microscopy, transmission electron microscopy, Raman spectroscopy, and X-ray diffraction. The film composition studied by X-ray photoelectron spectroscopy and Auger electron spectroscopy corresponded to a B:N stoichiometric ratio close to 1:1, and the band-gap value (5.65?eV) obtained by electron energy loss spectroscopy was consistent with the dielectric properties. The h-BN-containing capacitors were characterized by highly uniform properties, a reasonable dielectric constant (3), and low leakage current density, while graphene on h-BN substrates exhibited enhanced electrical performance such as the high carrier mobility and neutral Dirac voltage, which resulted from the low density of charged impurities on the h-BN surface.

SUBMITTER: Park H 

PROVIDER: S-EPMC5214515 | biostudies-literature | 2017 Jan

REPOSITORIES: biostudies-literature

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Large-scale synthesis of uniform hexagonal boron nitride films by plasma-enhanced atomic layer deposition.

Park Hamin H   Kim Tae Keun TK   Cho Sung Woo SW   Jang Hong Seok HS   Lee Sang Ick SI   Choi Sung-Yool SY  

Scientific reports 20170105


Hexagonal boron nitride (h-BN) has been previously manufactured using mechanical exfoliation and chemical vapor deposition methods, which make the large-scale synthesis of uniform h-BN very challenging. In this study, we produced highly uniform and scalable h-BN films by plasma-enhanced atomic layer deposition, which were characterized by various techniques including atomic force microscopy, transmission electron microscopy, Raman spectroscopy, and X-ray diffraction. The film composition studied  ...[more]

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