Ontology highlight
ABSTRACT:
SUBMITTER: Liu L
PROVIDER: S-EPMC8433434 | biostudies-literature | 2020
REPOSITORIES: biostudies-literature
Liu Lin L Wang Yingyi Y Sun Fuqin F Dai Yanbing Y Wang Shuqi S Bai Yuanyuan Y Li Lianhui L Li Tie T Zhang Ting T Qin Sujie S
Microsystems & nanoengineering 20200504
Manufacture of large-scale patterned nanomaterials via top-down techniques, such as printing and slurry coating, have been used for fabrication of miniaturized gas sensors. However, the reproducibility and uniformity of the sensors in wafer-scale fabrication are still a challenge. In this work, a "top-down" and "bottom-up" combined strategy was proposed to manufacture wafer-scaled miniaturized gas sensors with high-throughput by in-situ growth of Ni(OH)<sub>2</sub> nanowalls at specific location ...[more]