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Micro/Nano gas sensors: a new strategy towards in-situ wafer-level fabrication of high-performance gas sensing chips.


ABSTRACT: Nano-structured gas sensing materials, in particular nanoparticles, nanotubes, and nanowires, enable high sensitivity at a ppb level for gas sensors. For practical applications, it is highly desirable to be able to manufacture such gas sensors in batch and at low cost. We present here a strategy of in-situ wafer-level fabrication of the high-performance micro/nano gas sensing chips by naturally integrating microhotplatform (MHP) with nanopore array (NPA). By introducing colloidal crystal template, a wafer-level ordered homogenous SnO2 NPA is synthesized in-situ on a 4-inch MHP wafer, able to produce thousands of gas sensing units in one batch. The integration of micromachining process and nanofabrication process endues micro/nano gas sensing chips at low cost, high throughput, and with high sensitivity (down to ~20 ppb), fast response time (down to ~1 s), and low power consumption (down to ~30 mW). The proposed strategy of integrating MHP with NPA represents a versatile approach for in-situ wafer-level fabrication of high-performance micro/nano gas sensors for real industrial applications.

SUBMITTER: Xu L 

PROVIDER: S-EPMC5377049 | biostudies-literature | 2015 May

REPOSITORIES: biostudies-literature

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Micro/Nano gas sensors: a new strategy towards in-situ wafer-level fabrication of high-performance gas sensing chips.

Xu Lei L   Dai Zhengfei Z   Duan Guotao G   Guo Lianfeng L   Wang Yi Y   Zhou Hong H   Liu Yanxiang Y   Cai Weiping W   Wang Yuelin Y   Li Tie T  

Scientific reports 20150522


Nano-structured gas sensing materials, in particular nanoparticles, nanotubes, and nanowires, enable high sensitivity at a ppb level for gas sensors. For practical applications, it is highly desirable to be able to manufacture such gas sensors in batch and at low cost. We present here a strategy of in-situ wafer-level fabrication of the high-performance micro/nano gas sensing chips by naturally integrating microhotplatform (MHP) with nanopore array (NPA). By introducing colloidal crystal templat  ...[more]

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