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Sensitive capacitive pressure sensors based on graphene membrane arrays.

ABSTRACT: The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors, the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small, freestanding double-layer graphene membranes. We fabricate large arrays of small-diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene, even after high-temperature annealing. These sensors are readout using a low-cost battery-powered circuit board, with a responsivity of up to 47.8 aF Pa^-1 mm^-2, thereby outperforming the commercial sensors.

SUBMITTER: Siskins M

PROVIDER: S-EPMC8433463 | biostudies-literature | 2020

REPOSITORIES: biostudies-literature

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Sensitive capacitive pressure sensors based on graphene membrane arrays.

Šiškins Makars M Lee Martin M Wehenkel Dominique D van Rijn Richard R de Jong Tijmen W TW Renshof Johannes R JR Hopman Berend C BC Peters Willemijn S J M WSJM Davidovikj Dejan D van der Zant Herre S J HSJ Steeneken Peter G PG

Microsystems & nanoengineering 20201116

The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors, the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small, freestanding double-layer graphene membranes. We fabricate large arrays of sma ...[more]

PMID: 34567711

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