Micromachined piezoelectric microphones with in-plane directivity.
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ABSTRACT: Micromachined piezoelectric microphones with in-plane directivity are introduced. A beam rotates about center torsional pivots and is attached to piezoelectrically active end-springs. Rotation of the beam in response to sound pressure gradients produces spring deflections, which, in turn, produce an open-circuit voltage at the piezoelectric films. Prototypes are presented that contain a 20-μm-thick silicon beam and end-springs with 900-nm-thick chemical solution deposited lead zirconate titanate atop the surface of the end-springs. Acoustic directivity measurements are presented that confirm device functionality.
SUBMITTER: Kuntzman ML
PROVIDER: S-EPMC3579834 | biostudies-other | 2013 Feb
REPOSITORIES: biostudies-other
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