Graphene-Based Nanoscale Vacuum Channel Transistor.
Ontology highlight
ABSTRACT:
SUBMITTER: Xu J
PROVIDER: S-EPMC6172161 | biostudies-other | 2018 Oct
REPOSITORIES: biostudies-other
Publications
Graphene-Based Nanoscale Vacuum Channel Transistor.
Xu Ji J Gu Zhuyan Z Yang Wenxin W Wang Qilong Q Zhang Xiaobing X
Nanoscale research letters 20181004 1
We report the fabrication and electrical performance of nanoscale vacuum channel transistor (NVCT) based on graphene. Ninety-nanometer-width vacuum nano-channel could be precisely fabricated with standard electron beam lithography process. The optimization and treatment of surface damage and adhesive residue on graphene are carried out by ultrasonic cleaning and thermal annealing. Additionally, in situ electric characteristics are directly performed inside a vacuum chamber of scanning electron m ...[more]
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