Ontology highlight
ABSTRACT:
SUBMITTER: Shen Z
PROVIDER: S-EPMC8307793 | biostudies-literature | 2021 Jun
REPOSITORIES: biostudies-literature

Shen Zhihua Z Li Qiaoning Q Wang Xiao X Tian Jinshou J Wu Shengli S
Micromachines 20210622 7
Vacuum diodes, based on field emission mechanisms, demonstrate a superior performance in high-temperature operations compared to solid-state devices. However, when considering low operating voltage and continuous miniaturization, the cathode is usually made into a tip structure and the gap between cathode and anode is reduced to a nanoscale. This greatly increases the difficulty of preparation and makes it difficult to ensure fabrication consistency. Here, a metal-insulator-semiconductor (MIS) s ...[more]