Ontology highlight
ABSTRACT:
SUBMITTER: Siddiqi MWU
PROVIDER: S-EPMC6187823 | biostudies-other | 2018 Aug
REPOSITORIES: biostudies-other
Micromachines 20180818 8
This paper demonstrates the four fold enhancement in quality factor (Q) of a very high frequency (VHF) band piezoelectric Aluminum Nitride (AlN) on Silicon (Si) Lamb mode resonator by applying a unique wide acoustic bandgap (ABG) phononic crystal (PnC) at the anchoring boundaries of the resonator. The PnC unit cell topology, based on a solid disk, is characterized by a wide ABG of 120 MHz around a center frequency of 144.7 MHz from the experiments. The resulting wide ABG described in this work a ...[more]