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Micro-Hole Drilling on Glass Substrates—A Review.

ABSTRACT: Glass micromachining is currently becoming essential for the fabrication of micro-devices, including micro- optical-electro-mechanical-systems (MOEMS), miniaturized total analysis systems (?TAS) and microfluidic devices for biosensing. Moreover, glass is radio frequency (RF) transparent, making it an excellent material for sensor and energy transmission devices. Advancements are constantly being made in this field, yet machining smooth through-glass vias (TGVs) with high aspect ratio remains challenging due to poor glass machinability. As TGVs are required for several micro-devices, intensive research is being carried out on numerous glass micromachining technologies. This paper reviews established and emerging technologies for glass micro-hole drilling, describing their principles of operation and characteristics, and their advantages and disadvantages. These technologies are sorted into four machining categories: mechanical, thermal, chemical, and hybrid machining (which combines several machining methods). Achieved features by these methods are summarized in a table and presented in two graphs. We believe that this paper will be a valuable resource for researchers working in the field of glass micromachining as it provides a comprehensive review of the different glass micromachining technologies. It will be a useful guide for advancing these techniques and establishing new hybrid ones, especially since this is the first broad review in this field.

SUBMITTER: Hof LA

PROVIDER: S-EPMC6190316 | biostudies-other | 2017 Feb

REPOSITORIES: biostudies-other

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Project description:The microbiology of subsurface, hydrothermally influenced basaltic crust flanking mid-ocean ridges has remained understudied, due to the difficulty in accessing the subsurface environment. The instrumented boreholes resulting from scientific ocean drilling offer access to samples of the formation fluids circulating through oceanic crust. We analyzed the phylogenetic diversity of bacterial communities of fluid and microbial mat samples collected in situ from the observatory at Ocean Drilling Program Hole 896A, drilled into ~6.5 million-year-old basaltic crust on the flank of the Costa Rica Rift in the equatorial Pacific Ocean. Bacterial 16S rRNA gene sequences recovered from borehole fluid and from a microbial mat coating the outer surface of the fluid port revealed both unique and shared phylotypes. The dominant bacterial clones from both samples were related to the autotrophic, sulfur-oxidizing genus Thiomicrospira. Both samples yielded diverse gamma- and alphaproteobacterial phylotypes, as well as members of the Bacteroidetes, Planctomycetes, and Verrucomicrobia. Analysis of ribulose-1,5-bisphosphate carboxylase/oxygenase (RuBisCO) genes (cbbL and cbbM) from the sampling port mat and from the borehole fluid demonstrated autotrophic carbon assimilation potential for in situ microbial communities; most cbbL genes were related to those of the sulfur-oxidizing genera Thioalkalivibrio and Thiomicrospira, and cbbM genes were affiliated with uncultured phylotypes from hydrothermal vent plumes and marine sediments. Several 16S rRNA gene phylotypes from the 896A observatory grouped with phylotypes recovered from seawater-exposed basalts and sulfide deposits at inactive hydrothermal vents, but there is little overlap with hydrothermally influenced basaltic boreholes 1026B and U1301A on the Juan de Fuca Ridge flank, suggesting that site-specific characteristics of Hole 896A (i.e., seawater mixing into borehole fluids) affect the microbial community composition.

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Micro-Hole Drilling on Glass Substrates—A Review.

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