Ontology highlight
ABSTRACT:
SUBMITTER: Yeom WK
PROVIDER: S-EPMC11307275 | biostudies-literature | 2024 Aug
REPOSITORIES: biostudies-literature
Yeom Won Kyun WK Lee Jin Woong JW Bae Jin-A JA Sung Da In DI Kim Taeyeop T Lee Jung Heon JH Yeom Geun Young GY
ACS omega 20240723 31
Although metal-organic thin films are required for many biorelated applications, traditional deposition methods have proven challenging in preparing these composite materials. Here, a Co-organic composite thin film was prepared by plasma-enhanced atomic layer deposition (PEALD) with cobaltocene (Co(Cp)<sub>2</sub>) on polydimethylsiloxane (PDMS), using two very high frequency (VHF) NH<sub>3</sub> plasmas (60 and 100 MHz), for use as a tissue culture scaffold. VHF PEALD was employed to reduce the ...[more]