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Plow and ridge nanofabrication.

ABSTRACT: Traditionally, scanning probe lithography tools are limited in resolution by the radius of curvature of the tip used. Herein, an approach is described for patterning the ridge of piled-up polymer that naturally occurs when a scanning probe is pressed against a soft surface. The use of this phenomenon to transfer patterns to hard materials with 20 nm resolution is demonstrated.

SUBMITTER: Shim W 

PROVIDER: S-EPMC3773253 | biostudies-literature | 2013 Sep

REPOSITORIES: biostudies-literature

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Plow and ridge nanofabrication.

Shim Wooyoung W   Brown Keith A KA   Zhou Xiaozhu X   Rasin Boris B   Liao Xing X   Schmucker Abrin L AL   Mirkin Chad A CA  

Small (Weinheim an der Bergstrasse, Germany) 20130220 18

Traditionally, scanning probe lithography tools are limited in resolution by the radius of curvature of the tip used. Herein, an approach is described for patterning the ridge of piled-up polymer that naturally occurs when a scanning probe is pressed against a soft surface. The use of this phenomenon to transfer patterns to hard materials with 20 nm resolution is demonstrated. ...[more]

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