Ontology highlight
ABSTRACT:
SUBMITTER: Revilla RI
PROVIDER: S-EPMC3970131 | biostudies-literature | 2014
REPOSITORIES: biostudies-literature
Revilla Reynier I RI Li Xiao-Jun XJ Yang Yan-Lian YL Wang Chen C
Scientific reports 20140331
Silicon dioxide films are extensively used in nano and micro-electromechanical systems. Here we studied the influence of an external electric field on the mechanical properties of a SiO2 film by using nanoindentation technique of atomic force microscopy (AFM) and friction force microscopy (FFM). A giant augmentation of the relative elastic modulus was observed by increasing the localized electric field. A slight decrease in friction coefficients was also clearly observed by using FFM with the in ...[more]