Ontology highlight
ABSTRACT:
SUBMITTER: Lee E
PROVIDER: S-EPMC4820723 | biostudies-literature | 2016 Apr
REPOSITORIES: biostudies-literature
Lee Eunha E Kim Taeho T Benayad Anass A Hur Jihyun J Park Gyeong-Su GS Jeon Sanghun S
Scientific reports 20160405
In thin film technology, future semiconductor and display products with high performance, high density, large area, and ultra high definition with three-dimensional functionalities require high performance thin film transistors (TFTs) with high stability. Zinc oxynitride, a composite of zinc oxide and zinc nitride, has been conceded as a strong substitute to conventional semiconductor film such as silicon and indium gallium zinc oxide due to high mobility value. However, zinc oxynitride has been ...[more]