Ontology highlight
ABSTRACT:
SUBMITTER: Schneider L
PROVIDER: S-EPMC5057096 | biostudies-literature | 2016 Oct
REPOSITORIES: biostudies-literature
Schneider Ling L Feidenhans'l Nikolaj A NA Telecka Agnieszka A Taboryski Rafael J RJ
Scientific reports 20161011
We report a simple one-step maskless fabrication of inverted pyramids on silicon wafers by reactive ion etching. The fabricated surface structures exhibit excellent anti-reflective properties: The total reflectance of the nano inverted pyramids fabricated by our method can be as low as 12% without any anti-reflective layers, and down to only 0.33% with a silicon nitride coating. The results from angle resolved scattering measurements indicate that the existence of triple reflections is responsib ...[more]