Ontology highlight
ABSTRACT:
SUBMITTER: Cordoba R
PROVIDER: S-EPMC7005939 | biostudies-literature | 2019 Dec
REPOSITORIES: biostudies-literature
Córdoba Rosa R Mailly Dominique D Rezaev Roman O RO Smirnova Ekaterina I EI Schmidt Oliver G OG Fomin Vladimir M VM Zeitler Uli U Guillamón Isabel I Suderow Hermann H De Teresa José María JM
Nano letters 20191125 12
Novel schemes based on the design of complex three-dimensional (3D) nanoscale architectures are required for the development of the next generation of advanced electronic components. He<sup>+</sup> focused-ion-beam (FIB) microscopy in combination with a precursor gas allows one to fabricate 3D nanostructures with an extreme resolution and a considerably higher aspect ratio than FIB-based methods, such as Ga<sup>+</sup> FIB-induced deposition, or other additive manufacturing technologies. In this ...[more]