Ontology highlight
ABSTRACT:
SUBMITTER: Chee SW
PROVIDER: S-EPMC6008470 | biostudies-literature | 2018 Jun
REPOSITORIES: biostudies-literature
Chee See Wee SW Kammler Martin M Graham Jeremy J Gignac Lynne L Reuter Mark C MC Hull Robert R Ross Frances M FM
Scientific reports 20180619 1
We show that templating a Si surface with a focused beam of Si<sup>2+</sup> or Si<sup>+</sup> ions can create suitable nucleation sites for the subsequent growth of self-assembled Ge quantum dots by chemical vapor deposition. To determine the mechanism of patterning we use atomic force microscopy to show that, similar to Ga<sup>+</sup> patterning, the formation of a surface pit is required to enable control over Ge quantum dot locations. We find that relatively high implantation doses are requir ...[more]