Ontology highlight
ABSTRACT:
SUBMITTER: Ingale P
PROVIDER: S-EPMC7279530 | biostudies-literature | 2020 May
REPOSITORIES: biostudies-literature
Nanomaterials (Basel, Switzerland) 20200520 5
ZnO is a remarkable material with many applications in electronics and catalysis. Atomic layer deposition (ALD) of ZnO on flat substrates is an industrially applied and well-known process. Various studies describe the growth of ZnO layers on flat substrates. However, the growth characteristics and reaction mechanisms of atomic layer deposition of ZnO on mesoporous powders have not been well studied. This study investigates the ZnO ALD process based on diethylzinc (DEZn) and water with silica pow ...[more]