Ontology highlight
ABSTRACT:
SUBMITTER: Ramadan S
PROVIDER: S-EPMC7905810 | biostudies-literature | 2021 Feb
REPOSITORIES: biostudies-literature
Ramadan Sami S Zhang Yuanzhou Y Tsang Deana Kwong Hong DKH Shaforost Olena O Xu Lizhou L Bower Ryan R Dunlop Iain E IE Petrov Peter K PK Klein Norbert N
ACS omega 20210209 7
The performance of graphene devices is often limited by defects and impurities induced during device fabrication. Polymer residue left on the surface of graphene after photoresist processing can increase electron scattering and hinder electron transport. Furthermore, exposing graphene to plasma-based processing such as sputtering of metallization layers can increase the defect density in graphene and alter the device performance. Therefore, the preservation of the high-quality surface of graphen ...[more]