Unknown

Dataset Information

0

Reliable Fabrication of Graphene Nanostructure Based on e-Beam Irradiation of PMMA/Copper Composite Structure.


ABSTRACT: Graphene nanostructures are widely perceived as a promising material for fundamental components; their high-performance electronic properties offer the potential for the construction of graphene nanoelectronics. Numerous researchers have paid attention to the fabrication of graphene nanostructures, based on both top-down and bottom-up approaches. However, there are still some unavoidable challenges, such as smooth edges, uniform films without folds, and accurate dimension and location control. In this work, a direct writing method was reported for the in-situ preparation of a high-resolution graphene nanostructure of controllable size (the minimum feature size is about 15 nm), which combines the advantages of e-beam lithography and copper-catalyzed growth. By using the Fourier infrared absorption test, we found that the hydrogen and oxygen elements were disappearing due to knock-on displacement and the radiolysis effect. The graphene crystal is also formed via diffusion and the local heating effect between the e-beam and copper substrate, based on the Raman spectra test. This simple process for the in-situ synthesis of graphene nanostructures has many promising potential applications, including offering a way to make nanoelectrodes, NEMS cantilever resonant structures, nanophotonic devices and so on.

SUBMITTER: Bi K 

PROVIDER: S-EPMC8401420 | biostudies-literature |

REPOSITORIES: biostudies-literature

Similar Datasets

| S-EPMC5741774 | biostudies-literature
| S-EPMC6544637 | biostudies-literature
| S-EPMC4650821 | biostudies-other
| S-EPMC4731758 | biostudies-literature
| S-EPMC10928174 | biostudies-literature
| S-EPMC4508849 | biostudies-literature
| S-EPMC8413455 | biostudies-literature
| S-EPMC6193145 | biostudies-literature
| S-EPMC8671948 | biostudies-literature
| S-EPMC9860591 | biostudies-literature