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Cylindrical glass nanocapillaries patterned via coarse lithography (>1 μm) for biomicrofluidic applications.

ABSTRACT: We demonstrate a new method of fabricating in-plane cylindrical glass nanocapillaries (<100 nm) that does not require advanced patterning techniques but the standard coarse photolithography (>1 μm). These nanocapillaries are self-enclosed optically transparent and highly regular over large areas. Our method involves structuring μm-scale rectangular trenches in silicon, sealing the trenches into enclosed triangular channels by depositing phosphosilicate glass, and then transforming the channels into cylindrical capillaries through shape transformation by the reflow of annealed glass layer. Extended anneal has the structures shrunk into nanocapillaries preserving their cylindrical shape. Nanocapillaries ∼50 nm in diameter and effective stretching of digested λ-phage DNA in them are demonstrated.

SUBMITTER: Liu Y

PROVIDER: S-EPMC3555605 | biostudies-other | 2012

REPOSITORIES: biostudies-other

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Project description:Interaction of complex-shaped light fields with specially designed plasmonic nanostructures gives rise to various intriguing optical phenomena like nanofocusing of surface waves, enhanced nonlinear optical response and appearance of specific low-loss modes, which can not be excited with ordinary Gaussian-shaped beams. Related complex-shaped nanostructures are commonly fabricated using rather expensive and time-consuming electron- and ion-beam lithography techniques limiting real-life applicability of such an approach. In this respect, plasmonic nanostructures designed to benefit from their excitation with complex-shaped light fields, as well as high-performing techniques allowing inexpensive and flexible fabrication of such structures, are of great demand for various applications. Here, we demonstrate a simple direct maskless laser-based approach for fabrication of back-reflector-coupled plasmonic nanorings arrays. The approach is based on delicate ablation of an upper metal film of a metal-insulator-metal (MIM) sandwich with donut-shaped laser pulses followed by argon ion-beam polishing. After being excited with a radially polarized beam, the MIM configuration of the nanorings permitted to realize efficient nanofocusing of constructively interfering plasmonic waves excited in the gap area between the nanoring and back-reflector mirror. For optimized MIM geometry excited by radially polarized CVB, substantial enhancement of the electromagnetic near-fields at the center of the ring within a single focal spot with the size of 0.37λ2 can be achieved, which is confirmed by Finite Difference Time Domain calculations, as well as by detection of 100-fold enhanced photoluminescent signal from adsorbed organic dye molecules. Simple large-scale and cost-efficient fabrication procedure offering also a freedom in the choice of materials to design MIM structures, along with remarkable optical and plasmonic characteristics of the produced structures make them promising for realization of various nanophotonic and biosensing platforms that utilize cylindrical vector beam as a pump source.

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Cylindrical glass nanocapillaries patterned via coarse lithography (>1 μm) for biomicrofluidic applications.

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