Dataset Information

Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems.

ABSTRACT: Parylene C is a promising material for constructing flexible, biocompatible and corrosion-resistant microelectromechanical systems (MEMS) devices. Historically, Parylene C has been employed as an encapsulation material for medical implants, such as stents and pacemakers, due to its strong barrier properties and biocompatibility. In the past few decades, the adaptation of planar microfabrication processes to thin film Parylene C has encouraged its use as an insulator, structural and substrate material for MEMS and other microelectronic devices. However, Parylene C presents unique challenges during microfabrication and during use with liquids, especially for flexible, thin film electronic devices. In particular, the flexibility and low thermal budget of Parylene C require modification of the fabrication techniques inherited from silicon MEMS, and poor adhesion at Parylene-Parylene and Parylene-metal interfaces causes device failure under prolonged use in wet environments. Here, we discuss in detail the promises and challenges inherent to Parylene C and present our experience in developing thin-film Parylene MEMS devices.

SUBMITTER: Ortigoza-Diaz J

PROVIDER: S-EPMC6187609 | biostudies-other | 2018 Aug

REPOSITORIES: biostudies-other

ACCESS DATA

Publications

Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems.

Ortigoza-Diaz Jessica J Scholten Kee K Larson Christopher C Cobo Angelica A Hudson Trevor T Yoo James J Baldwin Alex A Weltman Hirschberg Ahuva A Meng Ellis E

Micromachines 20180822 9

Parylene C is a promising material for constructing flexible, biocompatible and corrosion-resistant microelectromechanical systems (MEMS) devices. Historically, Parylene C has been employed as an encapsulation material for medical implants, such as stents and pacemakers, due to its strong barrier properties and biocompatibility. In the past few decades, the adaptation of planar microfabrication processes to thin film Parylene C has encouraged its use as an insulator, structural and substrate mat ...[more]

PMID: 30424355

Similar Datasets

Project description:Understanding user's behavior and their interactions with artificial-intelligent-based systems is as important as analyzing the performance of the algorithms used in these systems. For instance, in the Recommender Systems domain, the accuracy of the recommendation algorithm was the ultimate goal for most systems designers. However, researchers and practitioners have realized that providing accurate recommendations is insufficient to enhance users' acceptance. A recommender system needs to focus on other factors that enhance its interactions with the users. Recent researches suggest augmenting these systems with persuasive capabilities. Persuasive features lead to increasing users' acceptance of the recommendations, which, in turn, enhances users' experience with these systems. Nonetheless, the literature still lacks a comprehensive view of the actual effect of persuasive principles on recommender users. To fill this gap, this study diagnoses how users of different characteristics get influenced by various persuasive principles that a recommender system uses. The study considers four users' aspects: age, gender, culture (continent), and personality traits. The paper also investigates the impact of the context (or application domain) on the influence of the persuasive principles. Two application domains (namely eCommerce and Movie recommendations) are considered. A within-subject user study was conducted. The analysis of (279) responses revealed that persuasive principles have the potential to enhance users' experience with recommender systems. The study also shows that, among the considered factors, culture, personality traits, and the domain of recommendations have a higher impact on the influence of persuasive principles than other factors. Based on the analysis of the results, the study provides insights and guidelines for recommender systems designers. These guidelines can be used as a reference for designing recommender systems with users' experience in mind. We suggest that considering the results presented in this paper could help to improve recommender-users interaction.

Dataset Information

Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems.

Publications

Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems.

Similar Datasets

OmicsDI is part of the ELIXIR infrastructure

Tweets