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Additive manufacturing of patterned 2D semiconductor through recyclable masked growth.

ABSTRACT: The 2D van der Waals crystals have shown great promise as potential future electronic materials due to their atomically thin and smooth nature, highly tailorable electronic structure, and mass production compatibility through chemical synthesis. Electronic devices, such as field effect transistors (FETs), from these materials require patterning and fabrication into desired structures. Specifically, the scale up and future development of "2D"-based electronics will inevitably require large numbers of fabrication steps in the patterning of 2D semiconductors, such as transition metal dichalcogenides (TMDs). This is currently carried out via multiple steps of lithography, etching, and transfer. As 2D devices become more complex (e.g., numerous 2D materials, more layers, specific shapes, etc.), the patterning steps can become economically costly and time consuming. Here, we developed a method to directly synthesize a 2D semiconductor, monolayer molybdenum disulfide (MoS2), in arbitrary patterns on insulating SiO2/Si via seed-promoted chemical vapor deposition (CVD) and substrate engineering. This method shows the potential of using the prepatterned substrates as a master template for the repeated growth of monolayer MoS2 patterns. Our technique currently produces arbitrary monolayer MoS2 patterns at a spatial resolution of 2 μm with excellent homogeneity and transistor performance (room temperature electron mobility of 30 cm2 V-1 s-1 and on-off current ratio of 107). Extending this patterning method to other 2D materials can provide a facile method for the repeatable direct synthesis of 2D materials for future electronics and optoelectronics.

SUBMITTER: Guo Y

PROVIDER: S-EPMC6397508 | biostudies-other | 2019 Feb

REPOSITORIES: biostudies-other

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Additive manufacturing of patterned 2D semiconductor through recyclable masked growth.

Guo Yunfan Y Shen Pin-Chun PC Su Cong C Lu Ang-Yu AY Hempel Marek M Han Yimo Y Ji Qingqing Q Lin Yuxuan Y Shi Enzheng E McVay Elaine E Dou Letian L Muller David A DA Palacios Tomás T Li Ju J Ling Xi X Kong Jing J

Proceedings of the National Academy of Sciences of the United States of America 20190212 9

The 2D van der Waals crystals have shown great promise as potential future electronic materials due to their atomically thin and smooth nature, highly tailorable electronic structure, and mass production compatibility through chemical synthesis. Electronic devices, such as field effect transistors (FETs), from these materials require patterning and fabrication into desired structures. Specifically, the scale up and future development of "2D"-based electronics will inevitably require large number ...[more]

PMID: 30755527

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Dataset Information

Additive manufacturing of patterned 2D semiconductor through recyclable masked growth.

Publications

Additive manufacturing of patterned 2D semiconductor through recyclable masked growth.

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