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On-chip wavelength division multiplexing filters using extremely efficient gate-driven silicon microring resonator array.


ABSTRACT: Silicon microring resonators (Si-MRRs) play essential roles in on-chip wavelength division multiplexing (WDM) systems due to their ultra-compact size and low energy consumption. However, the resonant wavelength of Si-MRRs is very sensitive to temperature fluctuations and fabrication process variation. Typically, each Si-MRR in the WDM system requires precise wavelength control by free carrier injection using PIN diodes or thermal heaters that consume high power. This work experimentally demonstrates gate-tuning on-chip WDM filters for the first time with large wavelength coverage for the entire channel spacing using a Si-MRR array driven by high mobility titanium-doped indium oxide (ITiO) gates. The integrated Si-MRRs achieve unprecedented wavelength tunability up to 589 pm/V, or VπL of 0.050 V cm with a high-quality factor of 5200. The on-chip WDM filters, which consist of four cascaded ITiO-driven Si-MRRs, can be continuously tuned across the 1543-1548 nm wavelength range by gate biases with near-zero power consumption.

SUBMITTER: Hsu WC 

PROVIDER: S-EPMC10066274 | biostudies-literature | 2023 Mar

REPOSITORIES: biostudies-literature

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On-chip wavelength division multiplexing filters using extremely efficient gate-driven silicon microring resonator array.

Hsu Wei-Che WC   Nujhat Nabila N   Kupp Benjamin B   Conley John F JF   Wang Alan X AX  

Scientific reports 20230331 1


Silicon microring resonators (Si-MRRs) play essential roles in on-chip wavelength division multiplexing (WDM) systems due to their ultra-compact size and low energy consumption. However, the resonant wavelength of Si-MRRs is very sensitive to temperature fluctuations and fabrication process variation. Typically, each Si-MRR in the WDM system requires precise wavelength control by free carrier injection using PIN diodes or thermal heaters that consume high power. This work experimentally demonstr  ...[more]

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