An ultrahigh resolution pressure sensor based on percolative metal nanoparticle arrays.

ABSTRACT: Tunneling conductance among nanoparticle arrays is extremely sensitive to the spacing of nanoparticles and might be applied to fabricate ultra-sensitive sensors. Such sensors are of paramount significance for various application, such as automotive systems and consumer electronics. Here, we represent a sensitive pressure sensor which is composed of a piezoresistive strain transducer fabricated from closely spaced nanoparticle films deposited on a flexible membrane. Benefited from this unique quantum transport mechanism, the thermal noise of the sensor decreases significantly, providing the opportunity for our devices to serve as high-performance pressure sensors with an ultrahigh resolution as fine as about 0.5?Pa and a high sensitivity of 0.13?kPa^-1. Moreover, our sensor with such an unprecedented response capability can be operated as a barometric altimeter with an altitude resolution of about 1?m. The outstanding behaviors of our devices make nanoparticle arrays for use as actuation materials for pressure measurement.

SUBMITTER: Chen M 

PROVIDER: S-EPMC6731318 | biostudies-literature | 2019 Sep

REPOSITORIES: biostudies-literature