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Ultrathin MEMS thermoelectric generator with Bi2Te3/(Pt, Au) multilayers and Sb2Te3 legs.

ABSTRACT: Multilayer structure is one of the research focuses of thermoelectric (TE) material in recent years. In this work, n-type 800 nm Bi2Te3/(Pt, Au) multilayers are designed with p-type Sb2Te3 legs to fabricate ultrathin microelectromechanical systems (MEMS) TE devices. The power factor of the annealed Bi2Te3/Pt multilayer reaches 46.5 ?W cm-1 K-2 at 303 K, which corresponds to more than a 350% enhancement when compared to pristine Bi2Te3. The annealed Bi2Te3/Au multilayers have a lower power factor than pristine Bi2Te3. The power of the device with Sb2Te3 and Bi2Te3/Pt multilayers measures 20.9 nW at 463 K and the calculated maximum output power reaches 10.5 nW, which is 39.5% higher than the device based on Sb2Te3 and Bi2Te3, and 96.7% higher than the Sb2Te3 and Bi2Te3/Au multilayers one. This work can provide an opportunity to improve TE properties by using multilayer structures and novel ultrathin MEMS TE devices in a wide variety of applications.

SUBMITTER: Liu Y

PROVIDER: S-EPMC7052102 | biostudies-literature | 2020 Mar

REPOSITORIES: biostudies-literature

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Ultrathin MEMS thermoelectric generator with Bi2Te3/(Pt, Au) multilayers and Sb2Te3 legs.

Liu Yang Y Mu Erzhen E Wu Zhenhua Z Che Zhanxun Z Sun Fangyuan F Fu Xuecheng X Wang Fengdan F Wang Xinwei X Hu Zhiyu Z

Nano convergence 20200303 1

Multilayer structure is one of the research focuses of thermoelectric (TE) material in recent years. In this work, n-type 800 nm Bi2Te3/(Pt, Au) multilayers are designed with p-type Sb2Te3 legs to fabricate ultrathin microelectromechanical systems (MEMS) TE devices. The power factor of the annealed Bi2Te3/Pt multilayer reaches 46.5 μW cm-1 K-2 at 303 K, which corresponds to more than a 350% enhancement when c ...[more]

PMID: 32124134

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Project description:Wearable electronics play a crucial role in advancing the rapid development of artificial intelligence, and as an attractive future vision, all-in-one wearable microsystems integrating powering, sensing, actuating and other functional components on a single chip have become an appealing tendency. Herein, we propose a wearable thermoelectric generator (ThEG) with a novel double-chain configuration to simultaneously realize sustainable energy harvesting and multi-functional sensing. In contrast to traditional single-chain ThEGs with the sole function of thermal energy harvesting, each individual chain of the developed double-chain thermoelectric generator (DC-ThEG) can be utilized to scavenge heat energy, and moreover, the combination of the two chains can be employed as functional sensing electrodes at the same time. The mature mass-fabrication technology of screen printing was successfully introduced to print n-type and p-type thermoelectric inks atop a polymeric substrate to form thermocouples to construct two independent chains, which makes this DC-ThEG flexible, high-performance and cost-efficient. The emerging material of silk fibroin was employed to cover the gap of the fabricated two chains to serve as a functional layer for sensing the existence of liquid water molecules in the air and the temperature. The powering and sensing functions of the developed DC-ThEG and their interactions were systematically studied via experimental measurements, which proved the DC-ThEG to be a robust multi-functional power source with a 151 mV open-circuit voltage. In addition, it was successfully demonstrated that this DC-ThEG can convert heat energy to achieve a 3.3 V output, matching common power demands of wearable electronics, and harvest biothermal energy to drive commercial electronics (i.e., a calculator). The integration approach of powering and multi-functional sensing based on this new double-chain configuration might open a new chapter in advanced thermoelectric generators, especially in the applications of all-in-one self-powered microsystems.

Dataset Information

Ultrathin MEMS thermoelectric generator with Bi2Te3/(Pt, Au) multilayers and Sb2Te3 legs.

Publications

Ultrathin MEMS thermoelectric generator with Bi<sub>2</sub>Te<sub>3</sub>/(Pt, Au) multilayers and Sb<sub>2</sub>Te<sub>3</sub> legs.

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