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Ultrathin MEMS thermoelectric generator with Bi2Te3/(Pt, Au) multilayers and Sb2Te3 legs.


ABSTRACT: Multilayer structure is one of the research focuses of thermoelectric (TE) material in recent years. In this work, n-type 800 nm Bi2Te3/(Pt, Au) multilayers are designed with p-type Sb2Te3 legs to fabricate ultrathin microelectromechanical systems (MEMS) TE devices. The power factor of the annealed Bi2Te3/Pt multilayer reaches 46.5 ?W cm-1 K-2 at 303 K, which corresponds to more than a 350% enhancement when compared to pristine Bi2Te3. The annealed Bi2Te3/Au multilayers have a lower power factor than pristine Bi2Te3. The power of the device with Sb2Te3 and Bi2Te3/Pt multilayers measures 20.9 nW at 463 K and the calculated maximum output power reaches 10.5 nW, which is 39.5% higher than the device based on Sb2Te3 and Bi2Te3, and 96.7% higher than the Sb2Te3 and Bi2Te3/Au multilayers one. This work can provide an opportunity to improve TE properties by using multilayer structures and novel ultrathin MEMS TE devices in a wide variety of applications.

SUBMITTER: Liu Y 

PROVIDER: S-EPMC7052102 | biostudies-literature | 2020 Mar

REPOSITORIES: biostudies-literature

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Ultrathin MEMS thermoelectric generator with Bi<sub>2</sub>Te<sub>3</sub>/(Pt, Au) multilayers and Sb<sub>2</sub>Te<sub>3</sub> legs.

Liu Yang Y   Mu Erzhen E   Wu Zhenhua Z   Che Zhanxun Z   Sun Fangyuan F   Fu Xuecheng X   Wang Fengdan F   Wang Xinwei X   Hu Zhiyu Z  

Nano convergence 20200303 1


Multilayer structure is one of the research focuses of thermoelectric (TE) material in recent years. In this work, n-type 800 nm Bi<sub>2</sub>Te<sub>3</sub>/(Pt, Au) multilayers are designed with p-type Sb<sub>2</sub>Te<sub>3</sub> legs to fabricate ultrathin microelectromechanical systems (MEMS) TE devices. The power factor of the annealed Bi<sub>2</sub>Te<sub>3</sub>/Pt multilayer reaches 46.5 μW cm<sup>-1</sup> K<sup>-2</sup> at 303 K, which corresponds to more than a 350% enhancement when c  ...[more]

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