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One-step sputtering of MoSSe metastable phase as thin film and predicted thermodynamic stability by computational methods.


ABSTRACT: We present the fabrication of a MoS2-xSex thin film from a co-sputtering process using MoS2 and MoSe2 commercial targets with 99.9% purity. The sputtering of the MoS2 and MoSe2 was carried out using a straight and low-cost magnetron radio frequency sputtering recipe to achieve a MoS2-xSex phase with x = 1 and sharp interface formation as confirmed by Raman spectroscopy, time-of-flight secondary ion mass spectroscopy, and cross-sectional scanning electron microscopy. The sulfur and selenium atoms prefer to distribute randomly at the octahedral geometry of molybdenum inside the MoS2-xSex thin film, indicated by a blue shift in the A1g and E1g vibrational modes at 355 cm-1 and 255 cm-1, respectively. This work is complemented by computing the thermodynamic stability of a MoS2-xSex phase whereby density functional theory up to a maximum selenium concentration of 33.33 at.% in both a Janus-like and random distribution. Although the Janus-like and the random structures are in the same metastable state, the Janus-like structure is hindered by an energy barrier below selenium concentrations of 8 at.%. This research highlights the potential of transition metal dichalcogenides in mixed phases and the need for further exploration employing low-energy, large-scale methods to improve the materials' fabrication and target latent applications of such structures.

SUBMITTER: Lopez-Galan OA 

PROVIDER: S-EPMC10966109 | biostudies-literature | 2024 Mar

REPOSITORIES: biostudies-literature

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One-step sputtering of MoSSe metastable phase as thin film and predicted thermodynamic stability by computational methods.

López-Galán Oscar A OA   Boll Torben T   Nogan John J   Chassaing Delphine D   Welle Alexander A   Heilmaier Martin M   Ramos Manuel M  

Scientific reports 20240326 1


We present the fabrication of a MoS<sub>2-x</sub>Se<sub>x</sub> thin film from a co-sputtering process using MoS<sub>2</sub> and MoSe<sub>2</sub> commercial targets with 99.9% purity. The sputtering of the MoS<sub>2</sub> and MoSe<sub>2</sub> was carried out using a straight and low-cost magnetron radio frequency sputtering recipe to achieve a MoS<sub>2-x</sub>Se<sub>x</sub> phase with x = 1 and sharp interface formation as confirmed by Raman spectroscopy, time-of-flight secondary ion mass spect  ...[more]

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